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Performance comparison of 5GHz VCOs integrated by CMOS compatible high Q MEMS inductors

Park, E.-C.; Baek, S.-H.; Song, T.-S.; Yoon, Jun-Bo; Yoon, E., 2003 IEEE MTT-S International Microwave Symposium Digest, v.2, pp.721 - 724, 2003-06-08

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