Browse "RIMS Conference Papers" by Author Parka K.-M.

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1
Atomic layer deposition of copper thin film using Cu II(diketoiminate)2 and H2

Han B.; Parka K.-M.; Park K.; Park J.-W.; Lee W.-J., 2009 IEEE International Interconnect Technology Conference, IITC 2009, pp.173 - 174, 2009-06-01

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