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Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation

Sattari, Hamed; Graziosi, Teodoro; Kiss, Marcell; Seok, Tae Joon; Han, Sangyoon; Wu, Ming C; Quack, Niels, 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017, IEEE Computer Society, 2017-08

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