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Dielectrric characteristics of ECR-PECVD TA2O5 thin films on various substrates Lee, Won-Jong; Chun, Soung Soon; Kim, Il, Proceedings of the IUMRS (International Union of Materials Research Society) 1994 International conference on Electronic Materials (ICEM'94), pp.321 - 326, ICEM, 1994-12 |
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