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High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC

Yoon, Jun-Bo; Han, Chul-Hi; Yoon, Euisik; Kim, CK, Proceedings of the 1999 IEEE MTT-S International Microwave Symposium Digest 'The Magic Touch of Microwaves', pp.1523 - 1526, IEEE, 1999-06-13

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