Browse "RIMS Journal Papers" by Subject atomic layer deposition

Showing results 1 to 2 of 2

1
A Study on the Electrical Properties of Atomic Layer Deposition Grown InOx on Flexible Substrates with Respect to N2O Plasma Treatment and the Associated Thin-Film Transistor Behavior under Repetitive Mechanical Stress

Sheng, Jiazhen; Park, Jozeph; Choi, Dong-won; Lim, Junhyung; Park, Jin-Seong, ACS APPLIED MATERIALS & INTERFACES, v.8, no.45, pp.31136 - 31143, 2016-11

2
Atomic Layer Deposition of Ru Thin Film Using a Newly Synthesized Precursor with Open-Coordinated Ligands

Oh, Seung Hoon; Hwang, Jeong Min; Park, Hyeonbin; Park, Dongseong; Song, Young Eun; Ko, Eun Chong; Park, Tae Joo; et al, ADVANCED MATERIALS INTERFACES, v.10, no.17, 2023-06

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