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THE EFFECTS OF CHLORINE CONTENT ON THE PROPERTIES OF TITANIUM CARBONITRIDE THIN-FILM DEPOSITED BY PLASMA ASSISTED CHEMICAL VAPOR-DEPOSITION

KIM, SB; Choi, Si-Kyung; Chun , Soung Soon; KIM, KH, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.9, no.4, pp.2174 - 2179, 1991-07

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