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Highly Reliable Polysilicon Oxide Grown by Electron Cyclotron Resonance Nitrous Oxide Plasma

Nae-In Lee; Jin-Woo Lee; Sung-Hoi Hur; Hyung-Sub Kim; Chul-Hi Han, IEEE ELECTRON DEVICE LETTERS, v.18, no.10, pp.486 - 488, 1997-10

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