DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yang, Shinhyuk | ko |
dc.contributor.author | Cho, Doo-Hee | ko |
dc.contributor.author | Ryu, Min Ki | ko |
dc.contributor.author | Park, Sang-Hee Ko | ko |
dc.contributor.author | Hwang, Chi-Sun | ko |
dc.contributor.author | Jang, Jin | ko |
dc.contributor.author | Jeong, Jae Kyeong | ko |
dc.date.accessioned | 2015-11-20T12:51:20Z | - |
dc.date.available | 2015-11-20T12:51:20Z | - |
dc.date.created | 2014-04-18 | - |
dc.date.created | 2014-04-18 | - |
dc.date.issued | 2010-02 | - |
dc.identifier.citation | IEEE ELECTRON DEVICE LETTERS, v.31, no.2, pp.144 - 146 | - |
dc.identifier.issn | 0741-3106 | - |
dc.identifier.uri | http://hdl.handle.net/10203/201735 | - |
dc.description.abstract | We fabricated high-performance thin-film transistors (TFTs) with an amorphous-Al-Sn-Zn-In-O (a-AT-ZIO) channel deposited by cosputtering using a dual Al-Zn-O and In-Sn-O target. The fabricated AT-ZIO TFTs, which feature a bottom-gate and bottom-contact configuration, exhibited a high field-effect mobility of 31.9 cm(2)/V . s, an excellent subthreshold gate swing of 0.07 V/decade, and a high I-on/(off) ratio of > 10(9), even below the process temperature of 250 degrees C. In addition, we demonstrated that the temperature and bias-induced stability of the bottom-gate TFT structure can significantly be improved by adopting a suitable passivation layer of atomic-layer-deposition- derived Al2O3 thin film. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | AMORPHOUS-SILICON | - |
dc.subject | ROOM-TEMPERATURE | - |
dc.title | High-Performance Al-Sn-Zn-In-O Thin-Film Transistors: Impact of Passivation Layer on Device Stability | - |
dc.type | Article | - |
dc.identifier.wosid | 000274018000018 | - |
dc.identifier.scopusid | 2-s2.0-75749140059 | - |
dc.type.rims | ART | - |
dc.citation.volume | 31 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 144 | - |
dc.citation.endingpage | 146 | - |
dc.citation.publicationname | IEEE ELECTRON DEVICE LETTERS | - |
dc.identifier.doi | 10.1109/LED.2009.2036944 | - |
dc.contributor.localauthor | Park, Sang-Hee Ko | - |
dc.contributor.nonIdAuthor | Yang, Shinhyuk | - |
dc.contributor.nonIdAuthor | Cho, Doo-Hee | - |
dc.contributor.nonIdAuthor | Ryu, Min Ki | - |
dc.contributor.nonIdAuthor | Hwang, Chi-Sun | - |
dc.contributor.nonIdAuthor | Jang, Jin | - |
dc.contributor.nonIdAuthor | Jeong, Jae Kyeong | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Amorphous semiconductor | - |
dc.subject.keywordAuthor | multicomponent oxide semiconductor | - |
dc.subject.keywordAuthor | passivation | - |
dc.subject.keywordAuthor | sputtering | - |
dc.subject.keywordAuthor | stability | - |
dc.subject.keywordAuthor | thin-film transistors (TFTs) | - |
dc.subject.keywordPlus | AMORPHOUS-SILICON | - |
dc.subject.keywordPlus | ROOM-TEMPERATURE | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.