DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Sanghoo | ko |
dc.contributor.author | Choe, Wonho | ko |
dc.contributor.author | Moon, Se Youn | ko |
dc.contributor.author | Yoo, Suk Jae | ko |
dc.date.accessioned | 2015-11-20T08:58:24Z | - |
dc.date.available | 2015-11-20T08:58:24Z | - |
dc.date.created | 2015-07-30 | - |
dc.date.created | 2015-07-30 | - |
dc.date.created | 2015-07-30 | - |
dc.date.created | 2015-07-30 | - |
dc.date.created | 2015-07-30 | - |
dc.date.issued | 2015-05 | - |
dc.identifier.citation | PLASMA SOURCES SCIENCE & TECHNOLOGY, v.24, no.3 | - |
dc.identifier.issn | 0963-0252 | - |
dc.identifier.uri | http://hdl.handle.net/10203/200914 | - |
dc.description.abstract | Due to the lack of convincing experimental evidence for electron information, there are still unclearly understood discharge phenomena in atmospheric pressure radio-frequency (rf) capacitive discharge, e.g. the electron heating, discharge structures, and the alpha-gamma mode transition. Thus, to perceive basic and meaningful principles with an unambiguous interpretation, simple and reliable electron diagnostics are required. Since bremsstrahlung emitted through electron-neutral atom interaction depends on electron density (n(e)) and temperature (T-e), their diagnostic is possible. In particular, T-e is easily estimated from the ratio of bremsstrahlung emissivities at two different wavelengths or more. In this paper, 2D T-e distribution in an argon atmospheric pressure capacitive discharge measured by using a digital camera and optical band pass filters is described. Time-averaged T-e in the bulk region obtained by a digital camera is consistent with that measured by an absolutely calibrated spectrometer. In addition, time-resolved emission spectra and the corresponding n(e) and T-e during one rf cycle of the argon capacitive discharge are discussed. The result shows that T-e varied from 2.3 to 3.0 eV, while n(e) did not change significantly. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | Spatio-temporally resolved electron temperature in argon radio-frequency capacitive discharge at atmospheric pressure | - |
dc.type | Article | - |
dc.identifier.wosid | 000356857800007 | - |
dc.identifier.scopusid | 2-s2.0-84937548733 | - |
dc.type.rims | ART | - |
dc.citation.volume | 24 | - |
dc.citation.issue | 3 | - |
dc.citation.publicationname | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.identifier.doi | 10.1088/0963-0252/24/3/032006 | - |
dc.contributor.localauthor | Park, Sanghoo | - |
dc.contributor.localauthor | Choe, Wonho | - |
dc.contributor.nonIdAuthor | Moon, Se Youn | - |
dc.contributor.nonIdAuthor | Yoo, Suk Jae | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | radio-frequency capacitive discharge | - |
dc.subject.keywordAuthor | bremsstrahlung | - |
dc.subject.keywordAuthor | electron diagnostics | - |
dc.subject.keywordAuthor | electron temperature profile | - |
dc.subject.keywordAuthor | atmospheric pressure plasma | - |
dc.subject.keywordPlus | RF DISCHARGE | - |
dc.subject.keywordPlus | ENERGY-DISTRIBUTION | - |
dc.subject.keywordPlus | MODE | - |
dc.subject.keywordPlus | TRANSITION | - |
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