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Estimation method for errors of an aerostatic planar XY stage based on measured profiles errors Hwang, Jooho; Park, Chun-Hong; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, v.46, no.9-12, pp.877 - 883, 2010-02 |
평면 XY 스테이지의 2D 오차 평가 및 개선 = Evaluation and enhancement for 2D error of planar XY stagelink 황주호; Hwang, Joo-Ho; et al, 한국과학기술원, 2006 |
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