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Browse "School of Mechanical and Aerospace Engineering(기계항공공학부)" by Subject 화학적기계연마▼a마멸▼a연마패드▼a조도▼a복제금형

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패드 단일미세돌기 접촉점에서의 화학적기계연마 연마성능 분석 및 개선 방안 = Study on characterization and improvement of CMP performance at single contact point of pad micro-asperitylink

류현준; 김산하; et al, 한국과학기술원, 2021

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