Browse "School of Mechanical and Aerospace Engineering(기계항공공학부)" by Author Tan, Say Hwa
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| An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator wafer Teo, Adrian J. T.; Li, Holden; Tan, Say Hwa; Yoon, Yong-Jin, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.27, no.6, 2017-06 |
| Design optimization for an SOI MOEMS accelerometer Teo, Adrian J. T.; Li, Holden King-Ho; Tan, Say Hwa; Yoon, Yong-Jin, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.24, no.1, pp.465 - 472, 2018-01 |
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