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Fabrication of three-dimensional SiC-based ceramic micropatterns using a sequential micromolding-and-pyrolysis process Lim, TW; Park, SH; Yang, Dong-Yol; Pham, TA; Lee, DH; Kim, DP; Chang, SI; et al, MICROELECTRONIC ENGINEERING, v.83, no.11-12, pp.2475 - 2481, 2006-11 |
Three-dimensional SiCN ceramic microstructures via nano-stereolithography of inorganic polymer photoresists Pham, TA; Kim, DP; Lim, TW; Park, SH; Yang, Dong-Yol; Lee, KS, ADVANCED FUNCTIONAL MATERIALS, v.16, no.9, pp.1235 - 1241, 2006-06 |
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