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Self-aligned micro tool and electrochemical discharge machining (ECDM) for ceramic materials Lim H.-J.; Lim Y.-M.; Kim, Soohyun; Kwak, Yoon Keun, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), pp.348 - 353, ICOSN, 2001-06-06 |
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