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On-machine surface profile metrology for Polishing large-scale Opitcs Khim, H.; Park, J.; Kwon, T.; You, J.; Kim, Seung-Woo, The 2nd International Conference on Positioning Technology, pp.141 - 145, 2006 |
Point diffraction interferometer with vibratinn desensitizing Capability You, J.; Park, J.; Kwon, T.; Khim, H.; Kim, Seung-Woo, KAIST-NMIJ Joint Workshop 2006 on Precision Metrology, pp.29 -, 2006-12 |
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