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Active compensation of dynamic stability for an air bearing stage with active magnetic preloads Ro, Seungkook; Kim, Soohyun; Kwak, Yoon-Keun; Park, Chunhong, 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008, pp.481 - 485, euspen, 2008-05 |
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