Browse "School of Electrical Engineering(전기및전자공학부)" by Subject Titanium compounds

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Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition

Kim, Choong-Ki; Ahn, Hyun Jun; Moon, Jung Min; Lee, Sukwon; Moon, Dong-Ii; Park, Jeong Soo; Cho, Byung-Jin; et al, SOLID-STATE ELECTRONICS, v.114, pp.90 - 93, 2015-12

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