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EFFECTS OF POST DEPOSITION ANNEALING ON THE ELECTRICAL-PROPERTIES AND RELIABILITY OF ULTRATHIN CHEMICAL-VAPOR-DEPOSITED TA2O5 FILMS HAN, LK; Yoon, Giwan; KWONG, DL; MATHEWS, VK; FAZAN, PC, IEEE ELECTRON DEVICE LETTERS, v.15, no.8, pp.280 - 282, 1994-08 |
EFFECTS OF SURFACE PRETREATMENT OF POLYSILICON ELECTRODE PRIOR TO SI3N4 DEPOSITION ON THE ELECTRICAL CHARACTERISTICS OF SI3N4 DIELECTRIC FILMS Yoon, Giwan; JOSHI, AB; KWONG, DL; MATHEWS, VK; THAKUR, RPS; FAZAN, PC, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.41, no.3, pp.347 - 351, 1994-03 |
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