Showing results 1 to 1 of 1
A novel X-ray mask for mix-and-match of optical and X-ray lithography applied in SOI device fabrication Choi, Sang-Soo; Kim, Jong Soo; Di Fabrizio, E; Gentili, M; Chung, Hai Bin; Yoo, Hyung Joun; Kim, Bo Woo, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.32, no.5, pp.727 - 730, 1998-05 |
Discover