Browse "School of Electrical Engineering(전기및전자공학부)" by Author Bliznetsov, VN
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| Damage free etching of RuO2 in O2/He plasma Cho, Byung Jin; Hwang, WS; Bliznetsov, VN; Chan, DSH; Yoo, WJ, 28th International Symposium on Dry Process, pp.0 - 0, 2006-11-29 |
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