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An Electrostatically Actuated Stacked-Electrode MEMS Relay With a Levering and Torsional Spring for Power Applications Song, Yong-Ha; Han, Chang-Hoon; Kim, Min-Wu; Lee, Jeong-Oen; Yoon, Jun-Bo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.21, no.5, pp.1209 - 1217, 2012-10 |
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