Browse "School of Electrical Engineering(전기및전자공학부)" by Subject acoustic sensor
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| A concave-patterned TiN/PECVD-Si3N4/TiN diaphragm MEMS acoustic sensor based on a polyimide sacrificial layer Lee, Jaewoo; Jeon, J. H.; Je, C. H.; Kim, Y-G; Lee, S. Q.; Yang, W. S.; Lee, J. S.; et al, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.25, no.12, 2015-12 |
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