Showing results 1 to 1 of 1
Mechanical Reliability of a Digital Micromirror With Interdigitated Cantilevers Kim, Dae-Hyun; Kim, Min-Wu; Jeon, Jin-Wan; Lim, Koeng-Su; Yoon, Jun-Bo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.19, no.5, pp.1197 - 1206, 2010-10 |
Discover