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Very Low-Work-Function ALD-Erbium Carbide (ErC2) Metal Electrode on High-K Dielectrics Ahn, Hyun Jun; Moon, Jungmin; Koh, Sungho; Seo, Yujin; Kim, Choong-Ki; Rho, Il Cheol; Kim, Choon Hwan; et al, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.63, no.7, pp.2858 - 2863, 2016-07 |
질화물 박막 증착 방법을 이용한 금속/게르마늄 접합의 쇼트키 장벽 높이 조절 = Schottky barrier height modulation of metal/germanium junction by using nitride thin films depositionlink 이석원; Lee, Suk-Won; et al, 한국과학기술원, 2014 |
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