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Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation Joh, Hyunjin; Anoop, Gopinathan; Lee, Won-June; Das, Dipjyoti; Lee, Jun Young; Kim, Tae Yeon; Kim, Hoon; et al, ACS APPLIED ELECTRONIC MATERIALS, v.3, no.3, pp.1244 - 1251, 2021-03 |
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