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Improved resonance characteristics by thermal annealing of W/SiO2 multi-layers in film bulk acoustic wave resonator devices Kim, Dong-Hyun; Yim, Mun-Hyuk; Chai, Dong-Kyu; Park, Jin-Seok; Yoon, Gi-Wan, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS , v.43, no.4A, pp.1545 - 1550, 2004-04 |
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