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Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap Jang, Weon-Wi; Lee, Jeong-Oen; Yoon, Jun-Bo; Kim, Min-Sang; Lee, Ji-Myoung; Kim, Sung-Min; Cho, Keun-Hwi; et al, APPLIED PHYSICS LETTERS, v.92, no.10, 2008-03 |
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