Browse "School of Electrical Engineering(전기및전자공학부)" by Author Je, Changhan
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| Bottom-inlet-type micro-electro-mechanical system acoustic sensors based on two polyimide/amorphous-Si sacrificial layers Lee, Jaewoo; Je, Changhan; Kim, Yi-Gyeong; Lee, Sung Q.; Yang, Woo-Seok; Lee, Sang-Gug, MICRO & NANO LETTERS, v.9, no.12, pp.845 - 849, 2014-12 |
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