Browse "School of Electrical Engineering(전기및전자공학부)" by Author Je, CH
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| A Capacitive-type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial layer Lee, Jae Woo; Je, CH; Kim, YG; Lee, SQ; Yang, WS; Lee, Sang Gug, 2015 International Conference on Electronics, Information and Communication, Institute of Electronics and Information Engineers, 2015-01-29 |
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