Browse "School of Electrical Engineering(전기및전자공학부)" by Author Di Fabrizio, E
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| A novel X-ray mask for mix-and-match of optical and X-ray lithography applied in SOI device fabrication Choi, Sang-Soo; Kim, Jong Soo; Di Fabrizio, E; Gentili, M; Chung, Hai Bin; Yoo, Hyung Joun; Kim, Bo Woo, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.32, no.5, pp.727 - 730, 1998-05 |
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