Browse "School of Electrical Engineering(전기및전자공학부)" by Subject INTERFERENCE LITHOGRAPHY

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The Effect of the Ratio of Lines to Spaces for Nanolithography Using Surface Plasmons

Kim, Eun Sung; Choi, Kyung Cheol, IEEE TRANSACTIONS ON NANOTECHNOLOGY, v.13, no.2, pp.203 - 207, 2014-03

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