Browse "School of Electrical Engineering(전기및전자공학부)" by Author Chung, HB
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| KrF excimer laser lithography with a dummy diffraction mask Kim, DH; Park, BS; Chung, HB; Lee, JH; Yoo, Hyung Joun; Oh, YH, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.29, no.3, pp.317 - 320, 1996-06 |
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