Multiplexed Gas Sensor Based on Heterogeneous Metal Oxide Nanomaterial Array Enabled by Localized Liquid-Phase Reaction

Abstract

A novel method for the selective and localized synthesis of nanomatetials and their in Situ integration based on = serial combination of localized liquid-phase reaction has been developed for the fabrication of heterogeneous nanomaterial array. This method prOvides simple, fast and cost-effective fabrication process by using well-controlled thermal energy and therefore solves the Challenging problems of assembly and integration of heterogeneous nanomaterial array in functional microelectronic devices. We have fabricated a parallel array Of TiO2 nanotubes, CuO nanospikes, and ZnO nanowites, which exhibited adequate gas sensing response. Furthermore, we could approximately determine individual gas concentrations in a mixture gas consisting of 0-2 ppm of NO2 and 0-800 ppm of CO gas species by analyzing multiple data from an array Of heterogeneous sensing nanomaterials.