Reduced Interface Diffusion of Cu Interconnects by Graphene-Based Capping Layer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 윤성준 | ko |
| dc.contributor.author | Alexander Yoon | ko |
| dc.contributor.author | 최성율 | ko |
| dc.contributor.author | 조병진 | ko |
| dc.date.accessioned | 2015-06-03T06:06:43Z | - |
| dc.date.available | 2015-06-03T06:06:43Z | - |
| dc.date.created | 2015-05-26 | - |
| dc.date.issued | 2015-03-26 | - |
| dc.identifier.citation | The 2nd Korean Graphene Symposium | - |
| dc.identifier.uri | http://hdl.handle.net/10203/198673 | - |
| dc.language | English | - |
| dc.publisher | 한국그래핀연구회 | - |
| dc.title | Reduced Interface Diffusion of Cu Interconnects by Graphene-Based Capping Layer | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | The 2nd Korean Graphene Symposium | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 충남 부여 롯데 리조트 | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | 윤성준 | - |
| dc.contributor.nonIdAuthor | Alexander Yoon | - |
| dc.contributor.nonIdAuthor | 최성율 | - |
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