Diffusion Barrier Property of an Ultrathin Graphene Layer for Advanced Cu Interconnect Technology
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 봉재훈 | ko |
| dc.contributor.author | 윤성준 | ko |
| dc.contributor.author | Alexander Yoon | ko |
| dc.contributor.author | 황완식 | ko |
| dc.contributor.author | 조병진 | ko |
| dc.date.accessioned | 2015-06-03T06:04:48Z | - |
| dc.date.available | 2015-06-03T06:04:48Z | - |
| dc.date.created | 2015-05-26 | - |
| dc.date.issued | 2015-03-26 | - |
| dc.identifier.citation | The 2nd Korean Graphene Symposium | - |
| dc.identifier.uri | http://hdl.handle.net/10203/198670 | - |
| dc.language | English | - |
| dc.publisher | 한국그래핀연구회 | - |
| dc.title | Diffusion Barrier Property of an Ultrathin Graphene Layer for Advanced Cu Interconnect Technology | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | The 2nd Korean Graphene Symposium | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 충남 부여 롯데 리조트 | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | 봉재훈 | - |
| dc.contributor.nonIdAuthor | 윤성준 | - |
| dc.contributor.nonIdAuthor | Alexander Yoon | - |
| dc.contributor.nonIdAuthor | 황완식 | - |
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.