Inductance enhancement of on-chip inductor with self-aligned magnetic na-noparticles

Abstract

This paper reports a novel method of integration of magnetic nanoparticles with an on-chip inductor. The proposed method is based on a spontaneous distribution of magnetic nanoparticles according to magnetic field formed by the integrated on-chip inductor itself. To confirm the proposed idea, a proper inductor shape and a microfluidic system were designed. The fabricated device showed driving current of over 300mA, and nanoparticle alignment time of 120sec. The fabricated on-chip inductors experienced average 39.8% of inductance increase compared with air-cored state.