DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Yoon, Jun-Bo | - |
dc.contributor.advisor | 윤준보 | - |
dc.contributor.author | Kim, Min-Wu | - |
dc.contributor.author | 김민우 | - |
dc.date.accessioned | 2015-04-23T06:12:13Z | - |
dc.date.available | 2015-04-23T06:12:13Z | - |
dc.date.issued | 2013 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=566023&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/196498 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 2013.8, [ v, 119 p. ] | - |
dc.description.abstract | Mechanical switches have the distinct advantages of high isolation, low on-resistance, low power consumption and abrupt switching characteristics; however, their high actuation voltage impedes wider usage. In this work, the problem of the high actuation voltage is solved in two ways. First, a novel electrode design is proposed and fabricated with cantilever-type switches. Introduction of the electrode enabled reduction of the actuation voltage to just 60 % of the level attained with conventional design. Moreover, faster switching and higher level of endurance could be achieved owing to the new electrode design. Second, an ultimate low-voltage torsional switch is proposed adopting stiction-recovery actuation. With advanced hinge design, actuation voltage was reduced to 1.5 V which is far lower than that of other mechanical switches. Moreover, the switch has shown the best performance in view of low-power consumption and reliability among other mechanical switches targeting mechanical logic application. As an example of possible applications, the switch was combined with TFT to comprise MEMS-TFT hybrid inverter and its electrical characteristics were demonstrated. | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 멤스 | - |
dc.subject | stiction | - |
dc.subject | pull-in voltage | - |
dc.subject | mechanical logic | - |
dc.subject | mechanical switch | - |
dc.subject | MEMS | - |
dc.subject | 기계식 스위치 | - |
dc.subject | 기계식 로직 | - |
dc.subject | 풀인 전압 | - |
dc.subject | 스틱션 | - |
dc.title | Study on Low-voltage Mechanical Switches With Stiction-recovery Actuation | - |
dc.title.alternative | 스틱션 회복 동작을 이용한 낮은 전압으로 동작하는 기계식 스위치에 관한 연구 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 566023/325007 | - |
dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
dc.identifier.uid | 020095019 | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.localauthor | 윤준보 | - |
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