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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Conference Papers(학술회의논문)

Development of optical emission uniformity diagnostics for multiple meter size plasmas

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dc.contributor.authorPark, Sanghoo-
dc.contributor.authorJang, Juhyeok-
dc.contributor.authorChoe, Wonho-
dc.date.accessioned2014-09-04T08:58:59Z-
dc.date.available2014-09-04T08:58:59Z-
dc.date.created2014-01-13-
dc.date.issued2013-11-20-
dc.identifier.citation1st International Conference on Surface Engineering (ICSE 2013), v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/190241-
dc.languageENG-
dc.publisher한국표면공학회-
dc.titleDevelopment of optical emission uniformity diagnostics for multiple meter size plasmas-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname1st International Conference on Surface Engineering (ICSE 2013)-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorChoe, Wonho-
dc.contributor.nonIdAuthorPark, Sanghoo-
dc.contributor.nonIdAuthorJang, Juhyeok-
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NE-Conference Papers(학술회의논문)
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