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레일리 산란광 측정과 RF 보상 랭뮤어 프로브를 통한 ICP 전자 특성 진단 연구 = Measurements of Rayleigh scattering signal and electron properties via RF compensated Langmuir probe in inductively coupled plasmalink

유용성; 김영철; et al, 한국과학기술원, 2021

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