Heterodyne interference lithography for one-step micro/nano multiscale structuring

Abstract

A heterodyne interference lithography method using two slightly different wavelengths for one-step multi-scale fabrication of micro/ nano hybrid structures is presented. This method has been used to locally fabricate one-and two-dimensional periodical sub-wavelength nanopatterns with a spatial periodicity of several micrometers. Furthermore, multilayered nanostructures with different layer compositions were fabricated by simply controlling the intensity ratio of the two wavelengths. As a result, this method can cost-effectively maximize the degree of freedom of the interference lithography method. The heterodyne interference lithography method can potentially be used in the fabrication of unconventional bio-mimetically engineered surfaces as well as heterocomplexed optics.