DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yang, Hyun-Ho | ko |
dc.contributor.author | Han, Chang-Hoon | ko |
dc.contributor.author | Lee, Jeong Oen | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.date.accessioned | 2014-09-01T07:30:11Z | - |
dc.date.available | 2014-09-01T07:30:11Z | - |
dc.date.created | 2014-06-30 | - |
dc.date.created | 2014-06-30 | - |
dc.date.issued | 2014-06 | - |
dc.identifier.citation | JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.24, no.6 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/189280 | - |
dc.description.abstract | As a powerful method to reduce actuation voltage in an electrostatic micro-actuator, we propose and investigate an electrostatic micro-actuator with a pre-charged series capacitor. In contrast to a conventional electrostatic actuator, the injected pre-charges into the series capacitor can freely modulate the pull-in voltage of the proposed actuator even after the completion of fabrication. The static characteristics of the proposed actuator were investigated by first developing analytical models based on a parallel-plate capacitor model. We then successfully designed and demonstrated a micro-switch with a pre-charged series capacitor. The pull-in voltage of the fabricated micro-switch was reduced from 65.4 to 0.6 V when pre-charged with 46.3 V. The on-resistance of the fabricated micro-switch was almost the same as the initial one, even when the device was pre-charged, which was demonstrated for the first time. All results from the analytical models, finite element method simulations, and measurements were in good agreement with deviations of less than 10%. This work can be favorably adapted to electrostatic micro-switches which need a low actuation voltage without noticeable degradation of performance. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | DEVICE | - |
dc.subject | ELECTRETS | - |
dc.subject | MEMS | - |
dc.title | Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration | - |
dc.type | Article | - |
dc.identifier.wosid | 000336805700012 | - |
dc.identifier.scopusid | 2-s2.0-84903638896 | - |
dc.type.rims | ART | - |
dc.citation.volume | 24 | - |
dc.citation.issue | 6 | - |
dc.citation.publicationname | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | - |
dc.identifier.doi | 10.1088/0960-1317/24/6/065012 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Lee, Jeong Oen | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | MEMS | - |
dc.subject.keywordAuthor | electrostatic actuation | - |
dc.subject.keywordAuthor | micro-actuator | - |
dc.subject.keywordPlus | DEVICE | - |
dc.subject.keywordPlus | MEMS | - |
dc.subject.keywordPlus | ELECTRETS | - |
dc.subject.keywordPlus | VOLTAGE | - |
dc.subject.keywordPlus | SWITCH | - |
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