Fabrication of Nano-Gap Electrodes with Controlled Gap-Widths Using Atomic-Layer-Deposited Sacrificial Layer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Chan Woo | ko |
| dc.contributor.author | Lim, Jung-Wook | ko |
| dc.contributor.author | Yu, Han Young | ko |
| dc.contributor.author | Pi, Ung Hwan | ko |
| dc.contributor.author | Choi, Sung-Yool | ko |
| dc.date.accessioned | 2014-08-28T01:10:46Z | - |
| dc.date.available | 2014-08-28T01:10:46Z | - |
| dc.date.created | 2013-05-13 | - |
| dc.date.created | 2013-05-13 | - |
| dc.date.issued | 2005-03-28 | - |
| dc.identifier.citation | 2005 MRS Spring Meeting | - |
| dc.identifier.uri | http://hdl.handle.net/10203/187542 | - |
| dc.language | English | - |
| dc.publisher | - | - |
| dc.title | Fabrication of Nano-Gap Electrodes with Controlled Gap-Widths Using Atomic-Layer-Deposited Sacrificial Layer | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2005 MRS Spring Meeting | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | San Francisco | - |
| dc.contributor.localauthor | Choi, Sung-Yool | - |
| dc.contributor.nonIdAuthor | Park, Chan Woo | - |
| dc.contributor.nonIdAuthor | Lim, Jung-Wook | - |
| dc.contributor.nonIdAuthor | Yu, Han Young | - |
| dc.contributor.nonIdAuthor | Pi, Ung Hwan | - |
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