밀도기반 클러스터링을 이용한 반도체 공정의 결함 패턴 분석 알고리즘 개발Development of an algorithm for defect pattern analysis in semiconductor manufacturing using density-based clustering
- Advisors
- 염봉진researcher; Yum, Bong-Jin
- Description
- 한국과학기술원 : 산업및시스템공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2012
- Identifier
- 487371/325007 / 020103042
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 산업및시스템공학과, 2012.2, [ iv, 48 p. ]
- Keywords
밀도기반 클러스터링; 의사결정나무; Core Point; Join-Count Statistics; Decision Tree; Density-Based Clustering
- Appears in Collection
- IE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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