A study on the characteristics of RF multi hole cathode CCP discharge in various noble gas복수 홀 전극 구조를 갖는 축전 결합 RF 방전 특성에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Chang, Hong-Young | - |
| dc.contributor.advisor | 장홍영 | - |
| dc.contributor.author | Lee, Hun-su | - |
| dc.contributor.author | 이헌수 | - |
| dc.date.accessioned | 2013-09-12T04:59:49Z | - |
| dc.date.available | 2013-09-12T04:59:49Z | - |
| dc.date.issued | 2011 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=490162&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/182353 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 2011.2, [ ii, 61 p. ] | - |
| dc.language | eng | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | CCP | - |
| dc.subject | Multi-hole | - |
| dc.subject | plasma density | - |
| dc.subject | Uniformity | - |
| dc.subject | 복수 홀 | - |
| dc.subject | 축전 결합 플라즈마 | - |
| dc.subject | 플라즈마 밀도 | - |
| dc.subject | 균일도 | - |
| dc.subject | 할로우캐소드 | - |
| dc.subject | Hollow cathode | - |
| dc.title | A study on the characteristics of RF multi hole cathode CCP discharge in various noble gas | - |
| dc.title.alternative | 복수 홀 전극 구조를 갖는 축전 결합 RF 방전 특성에 관한 연구 | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 490162/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 020065131 | - |
| dc.contributor.localauthor | Chang, Hong-Young | - |
| dc.contributor.localauthor | 장홍영 | - |
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- PH-Theses_Ph.D.(박사논문)
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