학위논문(석사) - 한국과학기술원 : 신소재공학과, 2012.2, [ iv, 44 p. ]
Proximity field nanopatterning; Three dimensional nanosturacture; phase mask; phase optics; 근접장 나노패터닝; 위상차 마스크; 위상차 조건; 삼차원 나노구조; diffraction efficiency
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