Characterization of silicon scanning mirror for laser display

Abstract

To use a scanning mirror for laser display, the size of the mirror must be larger than that of the laser beam and the laser beam must be scanned linearly with analog operation to produce an undistorted image. A 1500 mum in x 1200 mum in silicon scanning mirror having vertical comb fingers, which satisfies such requirements for laser display, has been fabricated and characterized. The open loop responses were measured using a laser doppler vibrometer (LDV) according to the input signal wave forms and the deflection angle was measured according to the control voltage with dc bias voltages. This scanning mirror showed a very linear actuating performance and it could be used for laser display as a galvanometric vertical scanner.