기상유도결정화법에 의한 비정질 Si 박막의 저온결정화와 다결정 Si 박막트랜지스터에의 응용에 관한 연구Low temperature crystallization of amorphous Si thin films using vapor-induced crystallization and its application to polycrystalline Si thin film transistors
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 엄지혜 | - |
| dc.contributor.author | Eom, Ji-Hye | - |
| dc.date.accessioned | 2013-09-12T04:41:52Z | - |
| dc.date.available | 2013-09-12T04:41:52Z | - |
| dc.date.issued | 2005 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=487895&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/181935 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2005.8, [ ix, 128 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 다결정 Si | - |
| dc.subject | 알루미늄유도결정화 | - |
| dc.subject | 기상유도결정화 | - |
| dc.subject | 박막트랜지스터 | - |
| dc.subject | vapor-induced crystallization | - |
| dc.subject | aluminum-induced crystallization | - |
| dc.subject | AIC | - |
| dc.subject | poly-Si | - |
| dc.subject | thin film transistor | - |
| dc.subject | TFT | - |
| dc.subject | VIC | - |
| dc.title | 기상유도결정화법에 의한 비정질 Si 박막의 저온결정화와 다결정 Si 박막트랜지스터에의 응용에 관한 연구 | - |
| dc.title.alternative | Low temperature crystallization of amorphous Si thin films using vapor-induced crystallization and its application to polycrystalline Si thin film transistors | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 487895/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020005829 | - |
| dc.contributor.localauthor | 안병태 | - |
| dc.contributor.localauthor | Ahn, Byung-Tae | - |
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.