CMP 공정용 다이아몬드 코팅 컨디셔너의 마모와 연마 특성Investigation on wear and grinding characteristics of the diamond coated conditioner in CMP process
- Advisors
- 강석중researcher; Kang Suk-Joong L.
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2010
- Identifier
- 487986/325007 / 020055020
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학과, 2010.8, [ ix, 101 p. ]
- Keywords
평탄연마; 컨디셔너; CMP; Conditioner; Diamond; 다이아몬드
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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