MEMS variable capacitor with highly linear C-V response and large capacitance tuning ratio높은 선형성과 넓은 정전용량 변화를 보이는 미세전자기계 시스템 가변 커패시터

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dc.contributor.advisorYoon, Jun-Bo-
dc.contributor.advisor윤준보-
dc.contributor.authorHan, Chang-Hoon-
dc.contributor.author한창훈-
dc.date.accessioned2013-09-12T02:00:53Z-
dc.date.available2013-09-12T02:00:53Z-
dc.date.issued2011-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=467791&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/180961-
dc.description학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 2011.2, [ v, 49 p. ]-
dc.description.abstractIn this thesis, an innovative and simple method to achieve ultra-linear behavior in a capacitance vs. voltage response and a large capacitance tuning ratio in a parallel-plate MEMS variable capacitor by moving the plate to an increasing-gap direction is proposed. By adopting a levering structure, the common closing-gap motion of an electrostatic actuator was transformed to the increasing-gap movement so as to decrease the capacitance as we increase the actuation voltage. By balancing out the rate that the plate moves up as we increase the actuation voltage and the rate that the capacitance decreases as the plate moves up, we could achieve the high linearity. The proposed MEMS variable capacitor, which was made by metal surface micromachining, showed an excellent linearity factor of 99.5% in the C-V response and the capacitance tuning ratio of 134% was achieved in actual usage range (10 ~ 45V) at low frequency. When it was operated at 1GHz, the proposed device showed the linearity factor of 99.5%, and the capacitance tuning ratio of 125%.eng
dc.languageeng-
dc.publisher한국과학기술원-
dc.subjectmicroelectromechanical system (MEMS)-
dc.subjectvariable capacitor-
dc.subjectlinearity-
dc.subjectcapacitance tuning ratio-
dc.subject미세전자기계시스템-
dc.subject가변 커패시터-
dc.subject선형성-
dc.subject정전용량 변화율-
dc.subject지렛대 구동-
dc.subjectlevering actuator-
dc.titleMEMS variable capacitor with highly linear C-V response and large capacitance tuning ratio-
dc.title.alternative높은 선형성과 넓은 정전용량 변화를 보이는 미세전자기계 시스템 가변 커패시터-
dc.typeThesis(Master)-
dc.identifier.CNRN467791/325007 -
dc.description.department한국과학기술원 : 전기 및 전자공학과, -
dc.identifier.uid020093588-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.localauthor윤준보-
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EE-Theses_Master(석사논문)
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